a 2021

Dynamics of the titanium ground state atoms and ions in HiPIMS discharge

HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS, Nikolay BRITUN et. al.

Basic information

Original name

Dynamics of the titanium ground state atoms and ions in HiPIMS discharge

Authors

HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN

Edition

International Conference on Metallurgical Coatings and Thin Films 2021, 2021

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

Keywords in English

magnetron sputtering; LIF; AAS; plasma diagnostics

Tags

International impact
Změněno: 11/1/2022 09:21, doc. Mgr. Jaroslav Hnilica, Ph.D.

Abstract

V originále

This contribution reports on plasma diagnostics of HiPIMS discharge by laser-induced fluorescence and atomic absorption spectroscopy. As a result of discharge characterization, the number densities, as well as temporal propagation of the neutral and ionized sputtered titanium atoms were determined. The results obtained in this study can be utilized to control the ionization degree, sputtering rate, as well as the other discharge parameters in industrial deposition processes involving HiPIMS discharges.

Links

GA19-00579S, research and development project
Name: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev
Investor: Czech Science Foundation
LM2018097, large research infrastructures
Name: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Acronym: CEPLANT)
Investor: Ministry of Education, Youth and Sports of the CR