Dynamics of the titanium ground state atoms and ions in HiPIMS discharge

HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN. Dynamics of the titanium ground state atoms and ions in HiPIMS discharge. In International Conference on Metallurgical Coatings and Thin Films 2021. 2021.

Basic information

• Original name: Dynamics of the titanium ground state atoms and ions in HiPIMS discharge
• Authors: HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN.
• Edition: International Conference on Metallurgical Coatings and Thin Films 2021, 2021.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• Organization unit: Faculty of Science
• Keywords in English: magnetron sputtering; LIF; AAS; plasma diagnostics
• Tags: International impact

Abstract

This contribution reports on plasma diagnostics of HiPIMS discharge by laser-induced fluorescence and atomic absorption spectroscopy. As a result of discharge characterization, the number densities, as well as temporal propagation of the neutral and ionized sputtered titanium atoms were determined. The results obtained in this study can be utilized to control the ionization degree, sputtering rate, as well as the other discharge parameters in industrial deposition processes involving HiPIMS discharges.

Links

• GA19-00579S, research and development project: Name: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

Investor: Czech Science Foundation

• LM2018097, large research infrastructures: Name: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Acronym: CEPLANT)

Investor: Ministry of Education, Youth and Sports of the CR