Time-resolved sputtered species number density in Ar/N2 HiPIMS
| BERNÁTOVÁ, Katarína, Peter KLEIN, Matej FEKETE, Jaroslav HNILICA and Petr VAŠINA. Time-resolved sputtered species number density in Ar/N2 HiPIMS. In HiPIMS Today Virtual Conference. 2021. |
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| Basic information | |
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| Original name | Time-resolved sputtered species number density in Ar/N2 HiPIMS |
| Name in Czech | Časově rozlišená studie hustoty rozprášených častíc v Ar/N2 HiPIMS procesu |
| Authors | BERNÁTOVÁ, Katarína (703 Slovakia, guarantor, belonging to the institution), Peter KLEIN (703 Slovakia, belonging to the institution), Matej FEKETE (703 Slovakia, belonging to the institution), Jaroslav HNILICA (203 Czech Republic, belonging to the institution) and Petr VAŠINA (203 Czech Republic, belonging to the institution). |
| Edition | HiPIMS Today Virtual Conference, 2021. |
| Other information | |
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| Original language | English |
| Type of outcome | Presentations at conferences |
| Field of Study | 10303 Particles and field physics |
| Country of publisher | United Kingdom of Great Britain and Northern Ireland |
| Confidentiality degree | is not subject to a state or trade secret |
| WWW | HiPIMS Today |
| RIV identification code | RIV/00216224:14310/21:00119557 |
| Organization unit | Faculty of Science |
| Keywords (in Czech) | diagnostika plazmy; HiPIMS; hustota titanu; dusík; OES; EBF |
| Keywords in English | plasma diagnostic; HiPIMS; titanium density; nitrogen; OES; EBF |
| Changed by | Changed by: Mgr. Marie Šípková, DiS., učo 437722. Changed: 13/1/2022 10:25. |
| Abstract |
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| The online presentation described the temporal evolution of sputtered titanium atoms and titanium ions ground state densities in the target and substrate region, for four different nitrogen gas flow, and for two differently powered pulses. |
| Abstract (in Czech) |
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| Online prezentace popísala časový vývoj hustoty rozprašovaných titanových atomů a titanových iontů v oblasti terče a substrátu, pro čtyři různé hodnoty průtoku dusíku a pro dva různě intenzivní pulzy. |
| Links | |
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| GA19-00579S, research and development project | Name: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev |
| Investor: Czech Science Foundation | |
| LM2018097, research and development project | Name: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Acronym: CEPLANT) |
| Investor: Ministry of Education, Youth and Sports of the CR | |
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