Characterization of randomly rough surfaces using
angle-resolved scattering of light and atomic force microscopy

J 2021

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

ŠUSTEK, Štěpán, Jiří VOHÁNKA, Ivan OHLÍDAL, Miloslav OHLÍDAL, Václav ŠULC et. al.

Basic information

Original name

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Authors

ŠUSTEK, Štěpán (guarantor), Jiří VOHÁNKA (203 Czech Republic, belonging to the institution), Ivan OHLÍDAL (203 Czech Republic, belonging to the institution), Miloslav OHLÍDAL, Václav ŠULC, Petr KLAPETEK and Nupinder Jeet KAUR

Edition

Journal of Optics, Bristol, IOP Publishing, 2021, 2040-8978

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10306 Optics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 2.077

RIV identification code

RIV/00216224:14310/21:00118706

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1088/2040-8986/ac1f35

UT WoS

000698822800001

Keywords in English

angle-resolved scattering; randomly rough surfaces; scalar diffraction theory; Rayleigh-Rice perturbation theory; atomic force microscopy

Abstract

V originále

The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh-Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.

Links

FV40328, research and development project

Name: Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

Investor: Ministry of Industry and Trade of the CR

90097, large research infrastructures

Name: CEPLANT

Citovat

ŠUSTEK, Štěpán, Jiří VOHÁNKA, Ivan OHLÍDAL, Miloslav OHLÍDAL, Václav ŠULC, Petr KLAPETEK and Nupinder Jeet KAUR. Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy. Journal of Optics. Bristol: IOP Publishing, 2021, vol. 23, No 10, p. 105602-105615. ISSN 2040-8978. Available from: https://dx.doi.org/10.1088/2040-8986/ac1f35.

@article{1821387,
   author = {Šustek, Štěpán and Vohánka, Jiří and Ohlídal, Ivan and Ohlídal, Miloslav and Šulc, Václav and Klapetek, Petr and Kaur, Nupinder Jeet},
   article_location = {Bristol},
   article_number = {10},
   doi = {http://dx.doi.org/10.1088/2040-8986/ac1f35},
   keywords = {angle-resolved scattering; randomly rough surfaces; scalar diffraction theory; Rayleigh-Rice perturbation theory; atomic force microscopy},
   language = {eng},
   issn = {2040-8978},
   journal = {Journal of Optics},
   title = {Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy},
   url = {https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35/},
   volume = {23},
   year = {2021}
}

TY  - JOUR
ID  - 1821387
AU  - Šustek, Štěpán - Vohánka, Jiří - Ohlídal, Ivan - Ohlídal, Miloslav - Šulc, Václav - Klapetek, Petr - Kaur, Nupinder Jeet
PY  - 2021
TI  - Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy
JF  - Journal of Optics
VL  - 23
IS  - 10
SP  - 105602
EP  - 105602
PB  - IOP Publishing
SN  - 20408978
KW  - angle-resolved scattering
KW  - randomly rough surfaces
KW  - scalar diffraction theory
KW  - Rayleigh-Rice perturbation theory
KW  - atomic force microscopy
UR  - https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35/
N2  - The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh-Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.
ER  -

ŠUSTEK, Štěpán, Jiří VOHÁNKA, Ivan OHLÍDAL, Miloslav OHLÍDAL, Václav ŠULC, Petr KLAPETEK and Nupinder Jeet KAUR. Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy. \textit{Journal of Optics}. Bristol: IOP Publishing, 2021, vol.~23, No~10, p.~105602-105615. ISSN~2040-8978. Available from: https://dx.doi.org/10.1088/2040-8986/ac1f35.

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