KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ and Petr VAŠINA. Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere. In 5th German-Czech Workshop on Nanomaterials. 2021.
Other formats:   BibTeX LaTeX RIS
Basic information
Original name Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere
Authors KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ and Petr VAŠINA.
Edition 5th German-Czech Workshop on Nanomaterials, 2021.
Other information
Type of outcome Presentations at conferences
Confidentiality degree is not subject to a state or trade secret
Keywords in English Spokes, magnetron, HiPIMS
Tags International impact
Changed by Changed by: Mgr. Peter Klein, Ph.D., učo 269740. Changed: 19/1/2022 16:30.
Links
GA19-00579S, research and development projectName: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev
Investor: Czech Science Foundation
PrintDisplayed: 12/8/2024 19:07