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@proceedings{1824168, author = {Klein, Peter and Hnilica, Jaroslav and Fekete, Matej and Šlapanská, Marta and Vašina, Petr}, booktitle = {5th German-Czech Workshop on Nanomaterials}, keywords = {Spokes, magnetron, HiPIMS}, title = {Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere}, year = {2021} }
TY - CONF ID - 1824168 AU - Klein, Peter - Hnilica, Jaroslav - Fekete, Matej - Šlapanská, Marta - Vašina, Petr PY - 2021 TI - Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere KW - Spokes, magnetron, HiPIMS ER -
KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ and Petr VAŠINA. Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere. In \textit{5th German-Czech Workshop on Nanomaterials}. 2021.
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