Trajectory displacement in a multi beam scanning electron microscope

STOPKA, Jan, Wilco ZUIDEMA and Pieter KRUIT. Trajectory displacement in a multi beam scanning electron microscope. Ultramicroscopy. Amsterdam: Elsevier, 2021, No 223. ISSN 0304-3991. Available from: https://dx.doi.org/10.1016/j.ultramic.2021.113223.

Basic information

Original name

Trajectory displacement in a multi beam scanning electron microscope

Authors

STOPKA, Jan, Wilco ZUIDEMA and Pieter KRUIT

Edition

Ultramicroscopy, Amsterdam, Elsevier, 2021, 0304-3991

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Other information

Type of outcome

Článek v odborném periodiku

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 2.994

DOI

http://dx.doi.org/10.1016/j.ultramic.2021.113223

Keywords in English

Trajectory displacement; Multi-beam electron microscope; Coulomb interactions; Slice method; Electron optics

Tags

RIV ne

Tags

International impact, Reviewed

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Abstract

V originále

The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.