| VOHÁNKA, Jiří, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ, Petr KLAPETEK and Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries. Optics Express. Washington, D.C.: Optica Publishing Group, 2022, vol. 30, No 2, p. 2033-2047. ISSN 1094-4087. Available from: https://dx.doi.org/10.1364/OE.447146. |
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@article{1830997,
author = {Vohánka, Jiří and Ohlídal, Ivan and Buršíková, Vilma and Klapetek, Petr and Kaur, Nupinder Jeet},
article_location = {Washington, D.C.},
article_number = {2},
doi = {http://dx.doi.org/10.1364/OE.447146},
keywords = {polymer; thin film; single-crystal substrate; silicon},
language = {eng},
issn = {1094-4087},
journal = {Optics Express},
title = {Optical characterization of inhomogeneous thin films with randomly rough boundaries},
url = {https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886},
volume = {30},
year = {2022}
}
TY - JOUR
ID - 1830997
AU - Vohánka, Jiří - Ohlídal, Ivan - Buršíková, Vilma - Klapetek, Petr - Kaur, Nupinder Jeet
PY - 2022
TI - Optical characterization of inhomogeneous thin films with randomly rough boundaries
JF - Optics Express
VL - 30
IS - 2
SP - 2033-2047
EP - 2033-2047
PB - Optica Publishing Group
SN - 10944087
KW - polymer
KW - thin film
KW - single-crystal substrate
KW - silicon
UR - https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886
N2 - An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.
ER -
VOHÁNKA, Jiří, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ, Petr KLAPETEK and Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries. \textit{Optics Express}. Washington, D.C.: Optica Publishing Group, 2022, vol.~30, No~2, p.~2033-2047. ISSN~1094-4087. Available from: https://dx.doi.org/10.1364/OE.447146.
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