Optical characterization of inhomogeneous thin films with
randomly rough boundaries

J 2022

Optical characterization of inhomogeneous thin films with randomly rough boundaries

VOHÁNKA, Jiří, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ, Petr KLAPETEK, Nupinder Jeet KAUR et. al.

Basic information

Original name

Optical characterization of inhomogeneous thin films with randomly rough boundaries

Authors

VOHÁNKA, Jiří (203 Czech Republic, guarantor, belonging to the institution), Ivan OHLÍDAL (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Petr KLAPETEK and Nupinder Jeet KAUR

Edition

Optics Express, Washington, D.C. Optica Publishing Group, 2022, 1094-4087

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

20506 Coating and films

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 3.800

RIV identification code

RIV/00216224:14310/22:00119633

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1364/OE.447146

UT WoS

000745037500108

Keywords in English

polymer; thin film; single-crystal substrate; silicon

Abstract

V originále

An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.

Links

FV40328, research and development project

Name: Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

Investor: Ministry of Industry and Trade of the CR

GA19-15240S, research and development project

Name: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Czech Science Foundation

90097, large research infrastructures

Name: CEPLANT

Citovat

VOHÁNKA, Jiří, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ, Petr KLAPETEK and Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries. Optics Express. Washington, D.C.: Optica Publishing Group, 2022, vol. 30, No 2, p. 2033-2047. ISSN 1094-4087. Available from: https://dx.doi.org/10.1364/OE.447146.

@article{1830997,
   author = {Vohánka, Jiří and Ohlídal, Ivan and Buršíková, Vilma and Klapetek, Petr and Kaur, Nupinder Jeet},
   article_location = {Washington, D.C.},
   article_number = {2},
   doi = {http://dx.doi.org/10.1364/OE.447146},
   keywords = {polymer; thin film; single-crystal substrate; silicon},
   language = {eng},
   issn = {1094-4087},
   journal = {Optics Express},
   title = {Optical characterization of inhomogeneous thin films with randomly rough boundaries},
   url = {https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886},
   volume = {30},
   year = {2022}
}

TY  - JOUR
ID  - 1830997
AU  - Vohánka, Jiří - Ohlídal, Ivan - Buršíková, Vilma - Klapetek, Petr - Kaur, Nupinder Jeet
PY  - 2022
TI  - Optical characterization of inhomogeneous thin films with randomly rough boundaries
JF  - Optics Express
VL  - 30
IS  - 2
SP  - 2033-2047
EP  - 2033-2047
PB  - Optica Publishing Group
SN  - 10944087
KW  - polymer
KW  - thin film
KW  - single-crystal substrate
KW  - silicon
UR  - https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886
N2  - An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.
ER  -

VOHÁNKA, Jiří, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ, Petr KLAPETEK and Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries. \textit{Optics Express}. Washington, D.C.: Optica Publishing Group, 2022, vol.~30, No~2, p.~2033-2047. ISSN~1094-4087. Available from: https://dx.doi.org/10.1364/OE.447146.

Detailed Information on Publication Record