Influence of defects of thin films on determining their thickness by the method based on white light interference

MUSILOVÁ, Jana and Ivan OHLÍDAL. Influence of defects of thin films on determining their thickness by the method based on white light interference (Influence of defects of thin films on determining their thi ckness by the method based on white light interference). J. Phys. D: Appl. Phys. 1993, 25(1992), No 1, p. 1131-1138. ISSN 0022-3727.

Basic information

Original name

Influence of defects of thin films on determining their thickness by the method based on white light interference

Name in Czech

Vliv defektů v tenkých vrstvách na určení jejich tloušťky metodou interference bílého světla

Authors

MUSILOVÁ, Jana (203 Czech Republic, guarantor) and Ivan OHLÍDAL (203 Czech Republic)

Edition

J. Phys. D: Appl. Phys. 1993, 0022-3727

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

UT WoS

A1992JD92100016

Keywords (in Czech)

tenké vrstvy

Keywords in English

thin films

Tags

thin films

Tags

International impact, Reviewed

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Abstract

V originále

Method of determining the thickness of a thin film by white light interference. Influence of defects.

In Czech

Metoda určení tloušťky tenké vrstvy pomocí interference bílého svqtla. Vliv defektů.