| JANČA, Jan, P. KRYŠTOF, Karel NAVRÁTIL, Zdeněk BOCHNÍČEK a Petr NĚMEC. Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture. Acta Physica Univesitatis Comenianae. Bratislava, roč. 36, č. 5, s. 57. ISSN 80-22306460. 1995. |
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@article{197263,
author = {Janča, Jan and Kryštof, P. and Navrátil, Karel and Bochníček, Zdeněk and Němec, Petr},
article_location = {Bratislava},
article_number = {5},
language = {eng},
issn = {80-22306460},
journal = {Acta Physica Univesitatis Comenianae},
title = {Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture},
volume = {36},
year = {1995}
}
TY - JOUR
ID - 197263
AU - Janča, Jan - Kryštof, P. - Navrátil, Karel - Bochníček, Zdeněk - Němec, Petr
PY - 1995
TI - Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture
JF - Acta Physica Univesitatis Comenianae
VL - 36
IS - 5
SP - 57
EP - 57
SN - 8022306460
ER -
JANČA, Jan, P. KRYŠTOF, Karel NAVRÁTIL, Zdeněk BOCHNÍČEK a Petr NĚMEC. Deposition and characterization of organosilicon thin films from TEOS+O2 gas mixture. \textit{Acta Physica Univesitatis Comenianae}. Bratislava, roč.~36, č.~5, s.~57. ISSN~80-22306460. 1995.
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