OHLÍDAL, Ivan, Daniel FRANTA and Jaroslav HORA. Spectroscopic Ellipsometry of Slightly Rough Surfaces Covered by Layers. In ECASIA 95 - 6th European Conference on Applications of Surface and Interface Analysis. Chichester, England, UK: John Willey & Sons, 1996, p. 823-826. ISBN 0-471-95899-9.
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Basic information
Original name Spectroscopic Ellipsometry of Slightly Rough Surfaces Covered by Layers
Authors OHLÍDAL, Ivan, Daniel FRANTA and Jaroslav HORA.
Edition Chichester, England, UK, ECASIA 95 - 6th European Conference on Applications of Surface and Interface Analysis, p. 823-826, 4 pp. 1996.
Publisher John Willey & Sons
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10301 Atomic, molecular and chemical physics
Country of publisher United Kingdom of Great Britain and Northern Ireland
Confidentiality degree is not subject to a state or trade secret
WWW URL
Organization unit Faculty of Science
ISBN 0-471-95899-9
Changed by Changed by: Mgr. Daniel Franta, Ph.D., učo 2000. Changed: 19/12/2003 19:16.
Abstract
In this paper it will be shown that formulae for the ellipsometric parameters derived using the Rayleigh-Rice theory (RRT) can be used to determine the root-mean-square (rms) values of the heights sigma and the values of the autocorrelation lenghts T.
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