Method of shearing interferometry for characterizing non-gaussian randomly rough surfaces

OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA and Aleš MICHÁLEK. Method of shearing interferometry for characterizing non-gaussian randomly rough surfaces. In Specification, Production, and Testing of Optical Components and Systems. USA: SPIE - The International Society for Optical Engineering, 1996, p. 442-451. ISBN 0-8194-2160-X.

Basic information

Original name

Method of shearing interferometry for characterizing non-gaussian randomly rough surfaces

Authors

OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA and Aleš MICHÁLEK

Edition

USA, Specification, Production, and Testing of Optical Components and Systems, p. 442-451, 1996

Publisher

SPIE - The International Society for Optical Engineering

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10306 Optics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Organization unit

Faculty of Science

ISBN

0-8194-2160-X

UT WoS

A1996BG32V00043

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Abstract

V originále

In this paper a method of shearing interferometry enabling us to perform a characterization of the basic statistical properties of non-gaussian randomly rough surfaces of solids will be described. This method is based on a statistical analysis of the form of dark fringe centres taking place in interferograms obtained by using a suitable interference microscope. By means of the method the root-mean-square (RMS) values of heights and slopes, the values of autocorrelation lengths, autocorrelation coefficients of the heights and autocorrelation coefficient of the slopes of surface irregularities of glass diffusers will be determined.