Technological application and spectral diagnostics of rf discharges

MAŠEK, Jaroslav; Antonín BRABLEC and Antonín BRABLEC. Technological application and spectral diagnostics of rf discharges. In Plasma physics and plasma technology. Minsk, Ukraine: University of Minsk, Ukraine, 1997, p. 356-359. 3.

Basic information

Original name

Technological application and spectral diagnostics of rf discharges

Authors

MAŠEK, Jaroslav; Antonín BRABLEC and Antonín BRABLEC

Edition

Minsk, Ukraine, Plasma physics and plasma technology, p. 356-359, 3, 1997

Publisher

University of Minsk, Ukraine

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Other information

Language

English

Type of outcome

Proceedings paper

Field of Study

10305 Fluids and plasma physics

Country of publisher

Ukraine

Confidentiality degree

is not subject to a state or trade secret

RIV identification code

RIV/00216224:14310/97:00000580

Organization unit

Faculty of Science

Keywords in English

plasma discharges; spectral diagnostics

Tags

plasma discharges, spectral diagnostics

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Links

MSM 143100003, plan (intention)

Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates