PAVELKA, Radek, Jan HLÁVKA, Ivan OHLÍDAL and Helmut SITTER. Optical parameter analysis of thin absorbing films measured by the photovoltage method. Acta physica polonica A. Jaszowiec, Polsko: Intern.School on Physics of Semicond.Com, 1998, vol. 94, No 3, p. 468-472.
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Basic information
Original name Optical parameter analysis of thin absorbing films measured by the photovoltage method
Authors PAVELKA, Radek, Jan HLÁVKA, Ivan OHLÍDAL and Helmut SITTER.
Edition Acta physica polonica A, Jaszowiec, Polsko, Intern.School on Physics of Semicond.Com, 1998.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10306 Optics
Country of publisher Poland
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/98:00003183
Organization unit Faculty of Science
UT WoS 000076672500023
Changed by Changed by: prof. RNDr. Ivan Ohlídal, DrSc., učo 2397. Changed: 27/2/2001 16:09.
Abstract
A special method for measuring the optical parameters of thin absorbing films is presented. Within the method the radiation transmitted through the layer is measured. The transmitted radiation is detected by the space charge region which is located in the substrate at the interface with the layer. The space charge region acts as a photodetector placed just behind the layer. In this paper the method is applied to characterize a system of an absorbing ZnSe film on a GaAs substrate. The values of the optical parameters of the film are evaluated. This means that the value of the thickness and the spectral dependences of both the refractive index and extinction coefficient are determined. The spectral dependences of both optical constants are determined in the visible range. Finally, the comparison of our results obtained by this method with the results obtained from ellipsometric and reflectance measurements is presented.
Links
GA202/98/0988, research and development projectName: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod
Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
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