Ellipsometry of thin films

OHLÍDAL, Ivan and Daniel FRANTA. Ellipsometry of thin films. Acta Physica Slovaca. Bratislava: Institute of Physics, SAS, 1998, vol. 48, No 4, p. 459-468. ISSN 0323-0465.

Basic information

• Original name: Ellipsometry of thin films
• Authors: OHLÍDAL, Ivan (203 Czech Republic, guarantor) and Daniel FRANTA (203 Czech Republic).
• Edition: Acta Physica Slovaca, Bratislava, Institute of Physics, SAS, 1998, 0323-0465.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: Slovakia
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• RIV identification code: RIV/00216224:14310/98:00002060
• Organization unit: Faculty of Science
• UT WoS: 000075856700006

Abstract

In this paper a brief review of ellipsometric methods is presented for analyzing thin films. Examples of using these methods will be introduced as well. By means of results obtained using the ellipsometric methods introduced their practical meaning will be illustrated. It will be shown that the ellipsometric method can be tilized for analyzing single layers and multilayer systems in it successful way.

Links

• GA202/98/0988, research and development project: Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague