OHLÍDAL, Ivan, Daniel FRANTA, Jaroslav HORA, Karel NAVRÁTIL, Jan WEBER and Pavel JANDA. Analysis of thin films with slightly rough boundaries. Mikrochim. Acta. Wien: Springer-Verlag, 1998, Suppl. 15, No 1, p. 177-180. ISSN 0026-3672.
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Basic information
Original name Analysis of thin films with slightly rough boundaries
Authors OHLÍDAL, Ivan (203 Czech Republic, guarantor), Daniel FRANTA (203 Czech Republic), Jaroslav HORA (203 Czech Republic), Karel NAVRÁTIL (203 Czech Republic), Jan WEBER and Pavel JANDA.
Edition Mikrochim. Acta, Wien, Springer-Verlag, 1998, 0026-3672.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher Germany
Confidentiality degree is not subject to a state or trade secret
WWW URL
Impact factor Impact factor: 0.716
RIV identification code RIV/00216224:14310/98:00003184
Organization unit Faculty of Science
UT WoS 000075322100025
Keywords in English Spectroscopic Ellipsometry; Spectroscopic Reflectometry; Atomic Force Microscopy
Tags atomic force microscopy, spectroscopic ellipsometry, Spectroscopic reflectometry
Changed by Changed by: Mgr. Daniel Franta, Ph.D., učo 2000. Changed: 19/12/2003 19:25.
Abstract
In this paper presented method is based on a combination of variable angle spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy enabling us to determine the optical parameters and most significant statistical parameters of the rough boundaries characterizing the slightly rough single layers.
Links
GA202/98/0988, research and development projectName: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod
Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
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