| BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 192-195. ISBN 80-967454-6-8. |
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@inproceedings{205640,
author = {Buršíková, Vilma and Zajíčková, Lenka and Janča, Jan},
address = {Bratislava},
booktitle = {11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma},
edition = {1.},
keywords = {mechanical properties; thin Films; PECVD},
language = {eng},
location = {Bratislava},
isbn = {80-967454-6-8},
pages = {192-195},
publisher = {MFF UK, Bratislava},
title = {Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions},
year = {1998}
}
TY - JOUR
ID - 205640
AU - Buršíková, Vilma - Zajíčková, Lenka - Janča, Jan
PY - 1998
TI - Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions
PB - MFF UK, Bratislava
CY - Bratislava
SN - 8096745468
KW - mechanical properties
KW - thin Films
KW - PECVD
N2 - Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions
ER -
BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In \textit{11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p.~192-195. ISBN~80-967454-6-8.
|
