BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 192-195. ISBN 80-967454-6-8. |
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@inproceedings{205640, author = {Buršíková, Vilma and Zajíčková, Lenka and Janča, Jan}, address = {Bratislava}, booktitle = {11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}, edition = {1.}, keywords = {mechanical properties; thin Films; PECVD}, language = {eng}, location = {Bratislava}, isbn = {80-967454-6-8}, pages = {192-195}, publisher = {MFF UK, Bratislava}, title = {Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions}, year = {1998} }
TY - JOUR ID - 205640 AU - Buršíková, Vilma - Zajíčková, Lenka - Janča, Jan PY - 1998 TI - Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions PB - MFF UK, Bratislava CY - Bratislava SN - 8096745468 KW - mechanical properties KW - thin Films KW - PECVD N2 - Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions ER -
BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In \textit{11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p.~192-195. ISBN~80-967454-6-8.
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