Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions

BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 192-195. ISBN 80-967454-6-8.

Basic information

Original name

Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions

Authors

BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic)

Edition

1. vyd. Bratislava, 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma, p. 192-195, 1998

Publisher

MFF UK, Bratislava

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

ISBN

80-967454-6-8

Keywords in English

mechanical properties; thin Films; PECVD

Tags

mechanical properties, PECVD, thin films

Tags

International impact

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Abstract

V originále

Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions

In Czech

Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions