Influence of Deposition Parameters on Mechanical Properties opf
SiO2-like Protective Coatings

D 1998

Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings

BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA

Basic information

Original name

Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings

Authors

BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic)

Edition

1. vyd. Praha, ICPP, p. 918-921, 1998

Publisher

Ústav fyziky plazmatu ČAV, Praha

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

Keywords in English

mechanical propertires; thin Films; PECVD

Abstract

V originále

Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings

Detailed Information on Publication Record