ELIÁŠ, Marek and Jan JANČA. Diagnostics of RF Plasma During CNx Film Deposition. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 54-57. Part 1. ISBN 80-967454-6-8.
Other formats:   BibTeX LaTeX RIS
Basic information
Original name Diagnostics of RF Plasma During CNx Film Deposition
Authors ELIÁŠ, Marek and Jan JANČA.
Edition 1. vyd. Bratislava, 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma, p. 54-57, Part 1, 1998.
Publisher MFF UK, Bratislava
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
ISBN 80-967454-6-8
Keywords in English diagnostics; RF plasma; CNx films
Tags CNx films, diagnostics, RF plasma
Changed by Changed by: prof. RNDr. Jan Janča, DrSc., učo 29. Changed: 17/6/1999 14:17.
PrintDisplayed: 29/5/2024 01:42