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@inproceedings{205653, author = {Eliáš, Marek and Janča, Jan}, address = {Bratislava}, booktitle = {11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}, edition = {1.}, keywords = {diagnostics; RF plasma; CNx films}, language = {eng}, location = {Bratislava}, isbn = {80-967454-6-8}, pages = {54-57}, publisher = {MFF UK, Bratislava}, title = {Diagnostics of RF Plasma During CNx Film Deposition}, year = {1998} }
TY - JOUR ID - 205653 AU - Eliáš, Marek - Janča, Jan PY - 1998 TI - Diagnostics of RF Plasma During CNx Film Deposition VL - Part 1 PB - MFF UK, Bratislava CY - Bratislava SN - 8096745468 KW - diagnostics KW - RF plasma KW - CNx films ER -
ELIÁŠ, Marek and Jan JANČA. Diagnostics of RF Plasma During CNx Film Deposition. In \textit{11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p.~54-57. Part 1. ISBN~80-967454-6-8.
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