Diagnostics of RF Plasma During CNx Film Deposition

ELIÁŠ, Marek and Jan JANČA. Diagnostics of RF Plasma During CNx Film Deposition. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 54-57. Part 1. ISBN 80-967454-6-8.

Basic information

Original name

Diagnostics of RF Plasma During CNx Film Deposition

Authors

ELIÁŠ, Marek and Jan JANČA

Edition

1. vyd. Bratislava, 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma, p. 54-57, Part 1, 1998

Publisher

MFF UK, Bratislava

---

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

ISBN

80-967454-6-8

Keywords in English

diagnostics; RF plasma; CNx films

Tags

CNx films, diagnostics, RF plasma