Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD

ELIÁŠ, Marek, Josef ŠŮSTEK and Jan JANČA. Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD. In ICPP. 1st ed. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, p. 919-920.

Basic information

Original name

Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD

Authors

ELIÁŠ, Marek, Josef ŠŮSTEK and Jan JANČA

Edition

1. vyd. Praha, ICPP, p. 919-920, 1998

Publisher

Ústav fyziky plazmatu ČAV, Praha

---

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

Keywords in English

carbon nitride films; PECVD

Tags

carbon nitride films, PECVD