ELIÁŠ, Marek, Josef ŠŮSTEK and Jan JANČA. Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD. In ICPP. 1st ed. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, p. 919-920.
Other formats:   BibTeX LaTeX RIS
Basic information
Original name Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD
Authors ELIÁŠ, Marek, Josef ŠŮSTEK and Jan JANČA.
Edition 1. vyd. Praha, ICPP, p. 919-920, 1998.
Publisher Ústav fyziky plazmatu ČAV, Praha
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
Keywords in English carbon nitride films; PECVD
Tags carbon nitride films, PECVD
Changed by Changed by: prof. RNDr. Jan Janča, DrSc., učo 29. Changed: 17/6/1999 14:23.
PrintDisplayed: 30/9/2024 23:31