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@inproceedings{205654, author = {Eliáš, Marek and Šůstek, Josef and Janča, Jan}, address = {Praha}, booktitle = {ICPP}, edition = {1.}, keywords = {carbon nitride films; PECVD}, language = {eng}, location = {Praha}, pages = {919-920}, publisher = {Ústav fyziky plazmatu ČAV, Praha}, title = {Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD}, year = {1998} }
TY - JOUR ID - 205654 AU - Eliáš, Marek - Šůstek, Josef - Janča, Jan PY - 1998 TI - Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD PB - Ústav fyziky plazmatu ČAV, Praha CY - Praha KW - carbon nitride films KW - PECVD ER -
ELIÁŠ, Marek, Josef ŠŮSTEK and Jan JANČA. Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD. In \textit{ICPP}. 1st ed. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, p.~919-920.
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