ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 170-173. ISBN 80-967454-6-8.
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Basic information
Original name Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD
Authors ZAJÍČKOVÁ, Lenka (203 Czech Republic, guarantor), Vilma BURŠÍKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic).
Edition 1. vyd. Bratislava, 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma, p. 170-173, 1998.
Publisher MFF UK, Bratislava
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
ISBN 80-967454-6-8
Keywords in English carbon films; deposition; PECVD
Tags carbon films, deposition, PECVD
Tags International impact
Changed by Changed by: doc. Mgr. Lenka Zajíčková, Ph.D., učo 1414. Changed: 17/7/2007 17:22.
Abstract
Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD
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