ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 170-173. ISBN 80-967454-6-8. |
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@inproceedings{205890, author = {Zajíčková, Lenka and Buršíková, Vilma and Janča, Jan}, address = {Bratislava}, booktitle = {11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}, edition = {1.}, keywords = {carbon films; deposition; PECVD}, language = {eng}, location = {Bratislava}, isbn = {80-967454-6-8}, pages = {170-173}, publisher = {MFF UK, Bratislava}, title = {Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD}, year = {1998} }
TY - JOUR ID - 205890 AU - Zajíčková, Lenka - Buršíková, Vilma - Janča, Jan PY - 1998 TI - Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD PB - MFF UK, Bratislava CY - Bratislava SN - 8096745468 KW - carbon films KW - deposition KW - PECVD N2 - Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD ER -
ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD. In \textit{11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma}. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p.~170-173. ISBN~80-967454-6-8.
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