D 1998

Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD

ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA

Basic information

Original name

Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD

Authors

ZAJÍČKOVÁ, Lenka (203 Czech Republic, guarantor), Vilma BURŠÍKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic)

Edition

1. vyd. Bratislava, 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma, p. 170-173, 1998

Publisher

MFF UK, Bratislava

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

ISBN

80-967454-6-8

Keywords in English

carbon films; deposition; PECVD

Tags

Tags

International impact
Změněno: 17/7/2007 17:22, doc. Mgr. Lenka Zajíčková, Ph.D.

Abstract

V originále

Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD