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@inproceedings{205908, author = {Zajíčková, Lenka and Buršíková, Vilma and Janča, Jan}, address = {Bratislava, Slovakia}, booktitle = {Proceeding of Thin Film Nucleation Growth and Analysis}, edition = {1.}, keywords = {PECVD}, language = {eng}, location = {Bratislava, Slovakia}, isbn = {80-227-1063-6}, pages = {40-48}, publisher = {UK Bratislava, Slovakia}, title = {Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD}, year = {1998} }
TY - JOUR ID - 205908 AU - Zajíčková, Lenka - Buršíková, Vilma - Janča, Jan PY - 1998 TI - Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD PB - UK Bratislava, Slovakia CY - Bratislava, Slovakia SN - 8022710636 KW - PECVD N2 - Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD ER -
ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD. In \textit{Proceeding of Thin Film Nucleation Growth and Analysis}. 1st ed. Bratislava, Slovakia: UK Bratislava, Slovakia, 1998, p.~40-48. ISBN~80-227-1063-6.
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