ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD. In Proceeding of Thin Film Nucleation Growth and Analysis. 1st ed. Bratislava, Slovakia: UK Bratislava, Slovakia, 1998, p. 40-48. ISBN 80-227-1063-6.
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Basic information
Original name Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD
Authors ZAJÍČKOVÁ, Lenka (203 Czech Republic, guarantor), Vilma BURŠÍKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic).
Edition 1. vyd. Bratislava, Slovakia, Proceeding of Thin Film Nucleation Growth and Analysis, p. 40-48, 1998.
Publisher UK Bratislava, Slovakia
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
ISBN 80-227-1063-6
Keywords in English PECVD
Tags PECVD
Tags International impact
Changed by Changed by: doc. Mgr. Lenka Zajíčková, Ph.D., učo 1414. Changed: 17/7/2007 17:24.
Abstract
Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD
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