Comparison of AFM and optical methods at measuring nanometric surface roughness

OHLÍDAL, Ivan, Daniel FRANTA, Miloslav OHLÍDAL, Martin VIČAR and Petr KLAPETEK. Comparison of AFM and optical methods at measuring nanometric surface roughness. In Proceedings of the 3th Seminar on Quantitative Microscopy. Braunschweig, SRN: Physikalisch-Technische Bundesanstalt, 1998, p. 123-129. ISBN 3-89701-280-4.

Basic information

• Original name: Comparison of AFM and optical methods at measuring nanometric surface roughness
• Authors: OHLÍDAL, Ivan (203 Czech Republic, guarantor), Daniel FRANTA (203 Czech Republic), Miloslav OHLÍDAL, Martin VIČAR (203 Czech Republic) and Petr KLAPETEK (203 Czech Republic).
• Edition: Braunschweig, SRN, Proceedings of the 3th Seminar on Quantitative Microscopy, p. 123-129, 1998.
• Publisher: Physikalisch-Technische Bundesanstalt

Other information

• Original language: English
• Type of outcome: Proceedings paper
• Field of Study: 10302 Condensed matter physics
• Country of publisher: Germany
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• RIV identification code: RIV/00216224:14310/98:00002080
• Organization unit: Faculty of Science
• ISBN: 3-89701-280-4

Abstract

In this contribution a comparison of the values of basic quantities characterizing random nanometric surface roughness determined by AFM and optical methods is presented.

Links

• GA101/98/0772, research and development project: Name: Návrh a konstrukce zařízení pro in-situ měření plošné homogenity tenkých vrstev

Investor: Czech Science Foundation, Design and construction of the equipment for in-situ measurement of thin film surface homogeneity

• GA202/98/0988, research and development project: Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague