OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA a Miroslav TYKAL. Comparison of optical and non-optical methods for measuring surface roughness. In Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, s. 456-467. ISBN 0-8194-3306-3. |
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@inproceedings{207571, author = {Ohlídal, Ivan and Ohlídal, Miloslav and Franta, Daniel and Tykal, Miroslav}, address = {Bellingham, Washington, USA}, booktitle = {Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics}, keywords = {Coherent optics; Surface roughness; Metrology}, language = {eng}, location = {Bellingham, Washington, USA}, isbn = {0-8194-3306-3}, pages = {456-467}, publisher = {SPIE - The International Society for Optical Engineering}, title = {Comparison of optical and non-optical methods for measuring surface roughness}, url = {http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html}, year = {1999} }
TY - JOUR ID - 207571 AU - Ohlídal, Ivan - Ohlídal, Miloslav - Franta, Daniel - Tykal, Miroslav PY - 1999 TI - Comparison of optical and non-optical methods for measuring surface roughness PB - SPIE - The International Society for Optical Engineering CY - Bellingham, Washington, USA SN - 0819433063 KW - Coherent optics KW - Surface roughness KW - Metrology UR - http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html N2 - The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented. ER -
OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA a Miroslav TYKAL. Comparison of optical and non-optical methods for measuring surface roughness. In \textit{Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics}. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, s.~456-467. ISBN~0-8194-3306-3.
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