Comparison of optical and non-optical methods for measuring
surface roughness

D 1999

Comparison of optical and non-optical methods for measuring surface roughness

OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA and Miroslav TYKAL

Basic information

Original name

Comparison of optical and non-optical methods for measuring surface roughness

Authors

OHLÍDAL, Ivan (203 Czech Republic, guarantor), Miloslav OHLÍDAL, Daniel FRANTA (203 Czech Republic) and Miroslav TYKAL

Edition

Bellingham, Washington, USA, Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, p. 456-467, 1999

Publisher

SPIE - The International Society for Optical Engineering

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

RIV identification code

RIV/00216224:14310/99:00002100

Organization unit

Faculty of Science

ISBN

0-8194-3306-3

UT WoS

000082158500060

Keywords in English

Coherent optics; Surface roughness; Metrology

Abstract

V originále

The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.

Links

GA202/98/0988, research and development project

Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

VS96084, research and development project

Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague

Citovat

OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA and Miroslav TYKAL. Comparison of optical and non-optical methods for measuring surface roughness. In Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, p. 456-467. ISBN 0-8194-3306-3.

@inproceedings{207571,
   author = {Ohlídal, Ivan and Ohlídal, Miloslav and Franta, Daniel and Tykal, Miroslav},
   address = {Bellingham, Washington, USA},
   booktitle = {Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics},
   keywords = {Coherent optics; Surface roughness; Metrology},
   language = {eng},
   location = {Bellingham, Washington, USA},
   isbn = {0-8194-3306-3},
   pages = {456-467},
   publisher = {SPIE - The International Society for Optical Engineering},
   title = {Comparison of optical and non-optical methods for measuring surface roughness},
   url = {http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html},
   year = {1999}
}

TY  - JOUR
ID  - 207571
AU  - Ohlídal, Ivan - Ohlídal, Miloslav - Franta, Daniel - Tykal, Miroslav
PY  - 1999
TI  - Comparison of optical and non-optical methods for measuring surface roughness
PB  - SPIE - The International Society for Optical Engineering
CY  - Bellingham, Washington, USA
SN  - 0819433063
KW  - Coherent optics
KW  - Surface roughness
KW  - Metrology
UR  - http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html
N2  - The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.
ER  -

OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA and Miroslav TYKAL. Comparison of optical and non-optical methods for measuring surface roughness. In \textit{Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics}. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, p.~456-467. ISBN~0-8194-3306-3.

Detailed Information on Publication Record