Optical methods for surface characterization

OHLÍDAL, Ivan. Optical methods for surface characterization. In 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, p. 429-440. SPIE Proceeding Series, Volume 3820. ISBN 0-8194-3306-3.

Basic information

Original name

Optical methods for surface characterization

Authors

OHLÍDAL, Ivan

Edition

Bellingham, Washington, USA, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, p. 429-440, SPIE Proceeding Series, Volume 3820, 1999

Publisher

SPIE - The International Society for Optical Engineering

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Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/99:00003216

Organization unit

Faculty of Science

ISBN

0-8194-3306-3

Keywords in English

Optical methods; Solid surfaces Thin films

Tags

optical methods, Solid surfaces Thin films

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Abstract

V originále

In this review paper a survey of the most significant optical methods usable for characterizing solid surfaces is performed. Examples allowing to show practical features of applying these methods at investigatinthe surfaces mentioned are presented too. By means of these examples both a reliability and accuracy of the methods are namely demonstrated.

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Links

GA202/98/0988, research and development project

Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods