Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness

OHLÍDAL, Ivan, Daniel FRANTA, Petr KLAPETEK and Martin VIČAR. Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 1999, vol. 44, No 10, p. 307-311. ISSN 0447-6441.

Basic information

• Original name: Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness
• Authors: OHLÍDAL, Ivan (203 Czech Republic, guarantor), Daniel FRANTA (203 Czech Republic), Petr KLAPETEK (203 Czech Republic) and Martin VIČAR (203 Czech Republic).
• Edition: Jemná mechanika a optika, Přerov, Physical Institute, ASCR, 1999, 0447-6441.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10306 Optics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• RIV identification code: RIV/00216224:14310/99:00002111
• Organization unit: Faculty of Science

Abstract

In this paper a comparison of the values of the basic surface roughness parameters determined by atomic force microscopy and a combined optical method is performed for a chosen sample of SiO2-film with identically randomly rough boundaries placed onto a silicon single crystal wafer. The combined optical method is based on simultaneous interpretation of the experimental data corresponding to variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the comparison of the results achieved using both the methods mentioned can be successfully performed if the influence influence of individual spatial frequencies of the harmonic components of random surface roughness on the optical quantities measured is based into account.

Links

• GA202/98/0988, research and development project: Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague