JANČA, Marek, Jan JANČA, Vít KUDRLE and Antonín TÁLSKÝ. Kinetics of N2+HMDSZ gas phase chemical reactions in a remote RF plasma reactor with electron spin resonance. In Proceedings of 14th International Symposium on Plasma Chemistry. Praha: UFP AV CR, 1999. p. 1843-1848.
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Basic information
Original name Kinetics of N2+HMDSZ gas phase chemical reactions in a remote RF plasma reactor with electron spin resonance
Authors JANČA, Marek (203 Czech Republic), Jan JANČA (203 Czech Republic), Vít KUDRLE (203 Czech Republic, guarantor) and Antonín TÁLSKÝ (203 Czech Republic).
Edition Praha, Proceedings of 14th International Symposium on Plasma Chemistry, p. 1843-1848, 1999.
Publisher UFP AV CR
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/99:00001269
Organization unit Faculty of Science
Tags International impact
Changed by Changed by: prof. Mgr. Vít Kudrle, Ph.D., učo 2560. Changed: 6. 6. 2008 13:43.
Links
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
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