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@misc{2217417,
author = {Dvořák, Pavel and Žemlička, Radek and Přibyl, Roman and Tkáčik, Maroš and Pálenik, Juraj and Vašina, Petr and Skopal, Petr and Navrátil, Zdeněk and Buršíková, Vilma},
booktitle = {31st SPIG (Summer school and International Symposium on the Physics of Ionized Gases)},
keywords = {higher harmonic frequencies;plasma;capacitively coupled discharges},
language = {eng},
note = {Součástí publikace je také krátký abstrakt v konferenčním sborníku: Publ. Astron. Obs. Belgrade 102 (2022), 160. Poděkování patří i VVI LM2018097.},
title = {Higher harmonic frequencies of discharge voltage and current in a capacitively coupled plasma},
url = {https://publications.aob.rs/102/pdf/spig2022-23-8.pdf},
year = {2022}
}
TY - SLIDE
ID - 2217417
AU - Dvořák, Pavel - Žemlička, Radek - Přibyl, Roman - Tkáčik, Maroš - Pálenik, Juraj - Vašina, Petr - Skopal, Petr - Navrátil, Zdeněk - Buršíková, Vilma
PY - 2022
TI - Higher harmonic frequencies of discharge voltage and current in a capacitively coupled plasma
N1 - Součástí publikace je také krátký abstrakt v konferenčním sborníku: Publ. Astron. Obs. Belgrade 102 (2022), 160. Poděkování patří i VVI LM2018097.
KW - higher harmonic frequencies;plasma;capacitively coupled discharges
UR - https://publications.aob.rs/102/pdf/spig2022-23-8.pdf
N2 - The current-voltage characteristics of capacitively coupled discharges has nonlinear character, which is caused by sheaths and which leads to generation of higher harmonic frequencies of discharge current and voltage. Higher harmonics are strong especially at low pressure. Higher harmonics influence the behaviour of the plasma and, at the same time, they sensitively react on number of discharge parameters, which enables to use them for monitoring of various deposition and etching processes. The presentation summarizes several topics related to higher harmonic frequencies, namely the problematics of probe measurement of the high-frequency components of plasma potential, modeling of generation of higher harmonics and analysis why higher harmonics react so sensitively on the presence of a thin film during deposition/etching processes.
ER -
DVOŘÁK, Pavel, Radek ŽEMLIČKA, Roman PŘIBYL, Maroš TKÁČIK, Juraj PÁLENIK, Petr VAŠINA, Petr SKOPAL, Zdeněk NAVRÁTIL and Vilma BURŠÍKOVÁ. Higher harmonic frequencies of discharge voltage and current in a capacitively coupled plasma. In \textit{31st SPIG (Summer school and International Symposium on the Physics of Ionized Gases)}. 2022.
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