| ROŠTEK, Andrej, Petr ZIKÁN, Mario SCHIFFLER, Hannes JOOST, Mojmír JÍLEK, Heiko FRANK and Adam OBRUSNÍK. Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model. Surface and Coatings Technology. Elsevier, 2022, vol. 449, November, p. 1-9. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2022.128954. |
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@article{2235579,
author = {Roštek, Andrej and Zikán, Petr and Schiffler, Mario and Joost, Hannes and Jílek, Mojmír and Frank, Heiko and Obrusník, Adam},
article_number = {November},
doi = {http://dx.doi.org/10.1016/j.surfcoat.2022.128954},
keywords = {Test particle Monte Carlo; PVD; Antenna effect; Edge effect; Vacuum arc; Simulation; Model},
language = {eng},
issn = {0257-8972},
journal = {Surface and Coatings Technology},
title = {Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model},
url = {https://www.sciencedirect.com/science/article/abs/pii/S0257897222008751},
volume = {449},
year = {2022}
}
TY - JOUR
ID - 2235579
AU - Roštek, Andrej - Zikán, Petr - Schiffler, Mario - Joost, Hannes - Jílek, Mojmír - Frank, Heiko - Obrusník, Adam
PY - 2022
TI - Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model
JF - Surface and Coatings Technology
VL - 449
IS - November
SP - 1-9
EP - 1-9
PB - Elsevier
SN - 02578972
KW - Test particle Monte Carlo
KW - PVD
KW - Antenna effect
KW - Edge effect
KW - Vacuum arc
KW - Simulation
KW - Model
UR - https://www.sciencedirect.com/science/article/abs/pii/S0257897222008751
N2 - This work presents a novel particle-based computational model capable of predicting coating distribution and composition on real parts in ion-based physical vapor deposition (PVD) processes. The model treats ions as particles (using test particle Monte Carlo method) and electrons as a fluid (using Boltzmann's relation). This combination makes it possible to simulate a realistic plasma sheath around a coated part and locally enhanced electric field around the part's edges. This simulation tool is instrumental especially in predicting the so-called “antenna-effect” - i.e. changes in coating thickness and composition near sharp edges of coated parts. It can also be used for quantifying the effect of coater loading or fixture design, as illustrated by simulating the effect of a top-plate on the coating distribution. The model is validated by two experimental data sets - a milling tool and a drill bit, both coated by hard nitride coatings in a vacuum arc process.
ER -
ROŠTEK, Andrej, Petr ZIKÁN, Mario SCHIFFLER, Hannes JOOST, Mojmír JÍLEK, Heiko FRANK and Adam OBRUSNÍK. Simulating ion flux to 3D parts in vacuum arc coating: Investigating effect of part size using novel particle-based model. \textit{Surface and Coatings Technology}. Elsevier, 2022, vol.~449, November, p.~1-9. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2022.128954.
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