| OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jan DVOŘÁK, Petr KLAPETEK and Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies. Optics Express. Optica Publishing Group, 2022, vol. 30, No 21, p. 39068-39085. ISSN 1094-4087. Available from: https://dx.doi.org/10.1364/OE.470692. |
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@article{2243981,
author = {Ohlídal, Ivan and Vohánka, Jiří and Buršíková, Vilma and Dvořák, Jan and Klapetek, Petr and Kaur, Nupinder Jeet},
article_number = {21},
doi = {http://dx.doi.org/10.1364/OE.470692},
keywords = {optical characterization; ellipsometry; spectrophotometry; roughness; Rayleigh–Rice theory; polymer; thin film; single-crystal substrate; silicon},
language = {eng},
issn = {1094-4087},
journal = {Optics Express},
title = {Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies},
url = {https://doi.org/10.1364/OE.470692},
volume = {30},
year = {2022}
}
TY - JOUR
ID - 2243981
AU - Ohlídal, Ivan - Vohánka, Jiří - Buršíková, Vilma - Dvořák, Jan - Klapetek, Petr - Kaur, Nupinder Jeet
PY - 2022
TI - Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies
JF - Optics Express
VL - 30
IS - 21
SP - 39068-39085
EP - 39068-39085
PB - Optica Publishing Group
SN - 10944087
KW - optical characterization
KW - ellipsometry
KW - spectrophotometry
KW - roughness
KW - Rayleigh–Rice theory
KW - polymer
KW - thin film
KW - single-crystal substrate
KW - silicon
UR - https://doi.org/10.1364/OE.470692
N2 - Results concerning the optical characterization of two inhomogeneous polymer-like thin films deposited by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are presented. One of these films is deposited onto a smooth silicon surface while the latter film is deposited on a randomly rough silicon surface with a wide interval of spatial frequencies. A combination of variable-angle spectroscopic ellipsometry and spectroscopic reflectometry applied at near-normal incidence are utilized for characterizing both the films. An inhomogeneity of the films is described by the method based on multiple-beam interference of light and method replacing inhomogeneous thin films by multilayer systems. Homogeneous transition layers between the films and substrates are considered. The Campi–Coriasso dispersion model is used to express spectral dependencies of the optical constants of the polymer-like films and transition layers. A combination of the scalar diffraction theory and Rayleigh–Rice theory is used to include boundary roughness into formulae for the optical quantities of the rough polymer-like film. Within the optical characterization, the spectral dependencies of the optical constants at the upper and lower boundaries of both the polymer-like films are determined together with their thickness values and profiles of the optical constants. Roughness parameters are determined for the rough film. The values of the roughness parameters are confirmed by atomic force microscopy. Moreover, the optical constants and thicknesses of both the transition layers are determined. A discussion of the achieved results for both the polymer-like films and transition layers is performed.
ER -
OHLÍDAL, Ivan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Jan DVOŘÁK, Petr KLAPETEK and Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies. \textit{Optics Express}. Optica Publishing Group, 2022, vol.~30, No~21, p.~39068-39085. ISSN~1094-4087. Available from: https://dx.doi.org/10.1364/OE.470692.
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