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@misc{2277919, author = {Hnilica, Jaroslav and Ondryáš, Martin and Souček, Pavel and Klein, Peter and Fekete, Matej and Vašina, Petr}, booktitle = {HiPIMS Today 2023}, keywords = {magnetron, sputering, multipulse, OES, QCM, SEM, XRD}, language = {eng}, title = {Describing the multipulse HiPIMS deposition}, url = {https://www.hipims.today}, year = {2023} }
TY - SLIDE ID - 2277919 AU - Hnilica, Jaroslav - Ondryáš, Martin - Souček, Pavel - Klein, Peter - Fekete, Matej - Vašina, Petr PY - 2023 TI - Describing the multipulse HiPIMS deposition KW - magnetron, sputering, multipulse, OES, QCM, SEM, XRD UR - https://www.hipims.today ER -
HNILICA, Jaroslav, Martin ONDRYÁŠ, Pavel SOUČEK, Peter KLEIN, Matej FEKETE and Petr VAŠINA. Describing the multipulse HiPIMS deposition. In \textit{HiPIMS Today 2023}. 2023.
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