HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN. Dynamics of sputtered particles in multipulse HiPIMS discharge. Plasma Sources Science and Technology. IOP Publishing Ltd, 2023, vol. 32, No 4, p. 1-12. ISSN 0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/acc686. |
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@article{2277998, author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay}, article_number = {4}, doi = {http://dx.doi.org/10.1088/1361-6595/acc686}, keywords = {sputtering; multipulse; HiPIMS; discharge; LIF; AAS}, language = {eng}, issn = {0963-0252}, journal = {Plasma Sources Science and Technology}, title = {Dynamics of sputtered particles in multipulse HiPIMS discharge}, url = {https://doi.org/10.1088/1361-6595/acc686}, volume = {32}, year = {2023} }
TY - JOUR ID - 2277998 AU - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay PY - 2023 TI - Dynamics of sputtered particles in multipulse HiPIMS discharge JF - Plasma Sources Science and Technology VL - 32 IS - 4 SP - 1-12 EP - 1-12 PB - IOP Publishing Ltd SN - 09630252 KW - sputtering KW - multipulse KW - HiPIMS KW - discharge KW - LIF KW - AAS UR - https://doi.org/10.1088/1361-6595/acc686 N2 - The behavior of the ground state neutral and singly ionized atoms is studied in multipulse high power impulse magnetron sputtering processes. The time-resolved two-dimensional laser induced fluorescence was used for imaging the discharge volume (density mapping) during the plasma-on and plasma-off time phases. The role of the number of micropulses and delay time between the micropulses in the pulse package is analyzed and discussed systematically. In addition, the propagation of the sputtered particles from the target is investigated. ER -
HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN. Dynamics of sputtered particles in multipulse HiPIMS discharge. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2023, vol.~32, No~4, p.~1-12. ISSN~0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/acc686.
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