| HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN. Dynamics of sputtered particles in multipulse HiPIMS discharge. Plasma Sources Science and Technology. IOP Publishing Ltd, 2023, vol. 32, No 4, p. 1-12. ISSN 0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/acc686. |
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@article{2277998,
author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay},
article_number = {4},
doi = {http://dx.doi.org/10.1088/1361-6595/acc686},
keywords = {sputtering; multipulse; HiPIMS; discharge; LIF; AAS},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Dynamics of sputtered particles in multipulse HiPIMS discharge},
url = {https://doi.org/10.1088/1361-6595/acc686},
volume = {32},
year = {2023}
}
TY - JOUR
ID - 2277998
AU - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay
PY - 2023
TI - Dynamics of sputtered particles in multipulse HiPIMS discharge
JF - Plasma Sources Science and Technology
VL - 32
IS - 4
SP - 1-12
EP - 1-12
PB - IOP Publishing Ltd
SN - 09630252
KW - sputtering
KW - multipulse
KW - HiPIMS
KW - discharge
KW - LIF
KW - AAS
UR - https://doi.org/10.1088/1361-6595/acc686
N2 - The behavior of the ground state neutral and singly ionized atoms is studied in multipulse high power impulse magnetron sputtering processes. The time-resolved two-dimensional laser induced fluorescence was used for imaging the discharge volume (density mapping) during the plasma-on and plasma-off time phases. The role of the number of micropulses and delay time between the micropulses in the pulse package is analyzed and discussed systematically. In addition, the propagation of the sputtered particles from the target is investigated.
ER -
HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS and Nikolay BRITUN. Dynamics of sputtered particles in multipulse HiPIMS discharge. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2023, vol.~32, No~4, p.~1-12. ISSN~0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/acc686.
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