Detailed Information on Publication Record
2023
Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
KLEIN, Peter, Jaroslav HNILICA, Daniel LUNDIN, Pavel DVOŘÁK, Michal ZANÁŠKA et. al.Basic information
Original name
Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
Authors
KLEIN, Peter (703 Slovakia, belonging to the institution), Jaroslav HNILICA (203 Czech Republic, belonging to the institution), Daniel LUNDIN, Pavel DVOŘÁK (203 Czech Republic, belonging to the institution), Michal ZANÁŠKA, Ulf HELMERSSON and Petr VAŠINA (203 Czech Republic, belonging to the institution)
Edition
Plasma Sources Science and Technology, IOP Publishing Ltd, 2023, 0963-0252
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10305 Fluids and plasma physics
Country of publisher
United Kingdom of Great Britain and Northern Ireland
Confidentiality degree
není předmětem státního či obchodního tajemství
References:
Impact factor
Impact factor: 3.800 in 2022
RIV identification code
RIV/00216224:14310/23:00131367
Organization unit
Faculty of Science
UT WoS
001041303300001
Keywords in English
bipolar HiPIMS; fast camera screening; plasma diagnostics; emission spectroscopy; HiPIMS
Tags
Tags
International impact, Reviewed
Změněno: 21/2/2024 15:21, Mgr. Marie Šípková, DiS.
Abstract
V originále
Bipolar high power impulse magnetron sputtering introduces new possibilities to affect positive ions created during the negative discharge pulse in order to tailor thin films with specific parameters. This paper studies plasma emission in different experimental conditions during different phases of the positive pulse with spectral, spatial and temporal resolution. It is found that predominantly the working gas gives rise to plasma emission during the positive pulse. The plasma emission is observed only in regions of low magnetic confinement, forming a 'mushroom-like' shape in the middle of the target or a 'dome-like' shape on the outer parts of the target. An explanation of the discharge kinetics is proposed based on the acquired data.
Links
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