Temporal, spatial and spectroscopic study of plasma emission on
Cu target in bipolar HiPIMS

J 2023

Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS

KLEIN, Peter, Jaroslav HNILICA, Daniel LUNDIN, Pavel DVOŘÁK, Michal ZANÁŠKA et. al.

Basic information

Original name

Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS

Authors

KLEIN, Peter (703 Slovakia, belonging to the institution), Jaroslav HNILICA (203 Czech Republic, belonging to the institution), Daniel LUNDIN, Pavel DVOŘÁK (203 Czech Republic, belonging to the institution), Michal ZANÁŠKA, Ulf HELMERSSON and Petr VAŠINA (203 Czech Republic, belonging to the institution)

Edition

Plasma Sources Science and Technology, IOP Publishing Ltd, 2023, 0963-0252

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 3.800 in 2022

RIV identification code

RIV/00216224:14310/23:00131367

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1088/1361-6595/ace8b8

UT WoS

001041303300001

Keywords in English

bipolar HiPIMS; fast camera screening; plasma diagnostics; emission spectroscopy; HiPIMS

Abstract

V originále

Bipolar high power impulse magnetron sputtering introduces new possibilities to affect positive ions created during the negative discharge pulse in order to tailor thin films with specific parameters. This paper studies plasma emission in different experimental conditions during different phases of the positive pulse with spectral, spatial and temporal resolution. It is found that predominantly the working gas gives rise to plasma emission during the positive pulse. The plasma emission is observed only in regions of low magnetic confinement, forming a 'mushroom-like' shape in the middle of the target or a 'dome-like' shape on the outer parts of the target. An explanation of the discharge kinetics is proposed based on the acquired data.

Links

90239, large research infrastructures

Name: CEPLANT II

Citovat

KLEIN, Peter, Jaroslav HNILICA, Daniel LUNDIN, Pavel DVOŘÁK, Michal ZANÁŠKA, Ulf HELMERSSON and Petr VAŠINA. Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS. Plasma Sources Science and Technology. IOP Publishing Ltd, 2023, vol. 32, No 7, p. 1-8. ISSN 0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/ace8b8.

@article{2301337,
   author = {Klein, Peter and Hnilica, Jaroslav and Lundin, Daniel and Dvořák, Pavel and Zanáška, Michal and Helmersson, Ulf and Vašina, Petr},
   article_number = {7},
   doi = {http://dx.doi.org/10.1088/1361-6595/ace8b8},
   keywords = {bipolar HiPIMS; fast camera screening; plasma diagnostics; emission spectroscopy; HiPIMS},
   language = {eng},
   issn = {0963-0252},
   journal = {Plasma Sources Science and Technology},
   title = {Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS},
   url = {https://doi.org/10.1088/1361-6595/ace8b8},
   volume = {32},
   year = {2023}
}

TY  - JOUR
ID  - 2301337
AU  - Klein, Peter - Hnilica, Jaroslav - Lundin, Daniel - Dvořák, Pavel - Zanáška, Michal - Helmersson, Ulf - Vašina, Petr
PY  - 2023
TI  - Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
JF  - Plasma Sources Science and Technology
VL  - 32
IS  - 7
SP  - 1-8
EP  - 1-8
PB  - IOP Publishing Ltd
SN  - 09630252
KW  - bipolar HiPIMS
KW  - fast camera screening
KW  - plasma diagnostics
KW  - emission spectroscopy
KW  - HiPIMS
UR  - https://doi.org/10.1088/1361-6595/ace8b8
N2  - Bipolar high power impulse magnetron sputtering introduces new possibilities to affect positive ions created during the negative discharge pulse in order to tailor thin films with specific parameters. This paper studies plasma emission in different experimental conditions during different phases of the positive pulse with spectral, spatial and temporal resolution. It is found that predominantly the working gas gives rise to plasma emission during the positive pulse. The plasma emission is observed only in regions of low magnetic confinement, forming a 'mushroom-like' shape in the middle of the target or a 'dome-like' shape on the outer parts of the target. An explanation of the discharge kinetics is proposed based on the acquired data.
ER  -

KLEIN, Peter, Jaroslav HNILICA, Daniel LUNDIN, Pavel DVOŘÁK, Michal ZANÁŠKA, Ulf HELMERSSON and Petr VAŠINA. Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2023, vol.~32, No~7, p.~1-8. ISSN~0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/ace8b8.

Detailed Information on Publication Record