Other formats:
BibTeX
LaTeX
RIS
@inproceedings{234131, author = {Franta, Daniel and Zajíčková, Lenka}, address = {Bratislava}, booktitle = {Proceedings of 12th Symposium on Application of Plasma Processes}, language = {eng}, location = {Bratislava}, isbn = {80-223-1370-X}, pages = {158-159}, publisher = {Comenius University, Bratislava, Slovakia}, title = {Characterisation of DLC Films Prepared by PECVD}, url = {http://hydra.physics.muni.cz/~franta/bib/SAPP12_158.html}, year = {1999} }
TY - JOUR ID - 234131 AU - Franta, Daniel - Zajíčková, Lenka PY - 1999 TI - Characterisation of DLC Films Prepared by PECVD PB - Comenius University, Bratislava, Slovakia CY - Bratislava SN - 802231370X UR - http://hydra.physics.muni.cz/~franta/bib/SAPP12_158.html N2 - Multi-sample modification of variable angle of incidence spectroscopic ellipsometry (VASE) was used to characterize diamond like carbon (DLC) films prepared by plasma enhanced chemical vapor deposition (PECVD). These films were prepared on wafers of silicon single crystal in the planar capacitively coupled RF reactor. The gas feed for deposition was a mixture of methane (CH4) and argon (Ar). ER -
FRANTA, Daniel and Lenka ZAJÍČKOVÁ. Characterisation of DLC Films Prepared by PECVD. In \textit{Proceedings of 12th Symposium on Application of Plasma Processes}. Bratislava: Comenius University, Bratislava, Slovakia, 1999, p.~158-159. ISBN~80-223-1370-X.
|