FRANTA, Daniel and Lenka ZAJÍČKOVÁ. Characterisation of DLC Films Prepared by PECVD. In Proceedings of 12th Symposium on Application of Plasma Processes. Bratislava: Comenius University, Bratislava, Slovakia, 1999, p. 158-159. ISBN 80-223-1370-X.
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Basic information
Original name Characterisation of DLC Films Prepared by PECVD
Authors FRANTA, Daniel (203 Czech Republic, guarantor) and Lenka ZAJÍČKOVÁ (203 Czech Republic).
Edition Bratislava, Proceedings of 12th Symposium on Application of Plasma Processes, p. 158-159, 2 pp. 1999.
Publisher Comenius University, Bratislava, Slovakia
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Slovakia
Confidentiality degree is not subject to a state or trade secret
WWW URL
RIV identification code RIV/00216224:14310/99:00001776
Organization unit Faculty of Science
ISBN 80-223-1370-X
Tags International impact
Changed by Changed by: doc. Mgr. Lenka Zajíčková, Ph.D., učo 1414. Changed: 17/7/2007 17:31.
Abstract
Multi-sample modification of variable angle of incidence spectroscopic ellipsometry (VASE) was used to characterize diamond like carbon (DLC) films prepared by plasma enhanced chemical vapor deposition (PECVD). These films were prepared on wafers of silicon single crystal in the planar capacitively coupled RF reactor. The gas feed for deposition was a mixture of methane (CH4) and argon (Ar).
Links
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
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