| ZAJÍČKOVÁ, Lenka, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Deposition of CNx Films in Inductively Coupled RF Discharge. In Proceedings of ICPIG XXIV. 1999th ed. Warszaw: Institute of Plasma Phycics and Laser Miscofusion, 1999, p. 41-42. |
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@inproceedings{234491,
author = {Zajíčková, Lenka and Eliáš, Marek and Buršíková, Vilma and Janča, Jan and Lorenc, Michal},
address = {Warszaw},
booktitle = {Proceedings of ICPIG XXIV},
edition = {1999},
language = {eng},
location = {Warszaw},
pages = {41-42},
publisher = {Institute of Plasma Phycics and Laser Miscofusion},
title = {Deposition of CNx Films in Inductively Coupled RF Discharge},
year = {1999}
}
TY - JOUR
ID - 234491
AU - Zajíčková, Lenka - Eliáš, Marek - Buršíková, Vilma - Janča, Jan - Lorenc, Michal
PY - 1999
TI - Deposition of CNx Films in Inductively Coupled RF Discharge
PB - Institute of Plasma Phycics and Laser Miscofusion
CY - Warszaw
N2 - Deposition of CNx Films in Inductively Coupled RF Discharge
ER -
ZAJÍČKOVÁ, Lenka, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Deposition of CNx Films in Inductively Coupled RF Discharge. In \textit{Proceedings of ICPIG XXIV}. 1999th ed. Warszaw: Institute of Plasma Phycics and Laser Miscofusion, 1999, p.~41-42.
|
