ZAJÍČKOVÁ, Lenka, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Deposition of CNx Films in Inductively Coupled RF Discharge. In Proceedings of ICPIG XXIV. 1999th ed. Warszaw: Institute of Plasma Phycics and Laser Miscofusion, 1999, p. 41-42. |
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@inproceedings{234491, author = {Zajíčková, Lenka and Eliáš, Marek and Buršíková, Vilma and Janča, Jan and Lorenc, Michal}, address = {Warszaw}, booktitle = {Proceedings of ICPIG XXIV}, edition = {1999}, language = {eng}, location = {Warszaw}, pages = {41-42}, publisher = {Institute of Plasma Phycics and Laser Miscofusion}, title = {Deposition of CNx Films in Inductively Coupled RF Discharge}, year = {1999} }
TY - JOUR ID - 234491 AU - Zajíčková, Lenka - Eliáš, Marek - Buršíková, Vilma - Janča, Jan - Lorenc, Michal PY - 1999 TI - Deposition of CNx Films in Inductively Coupled RF Discharge PB - Institute of Plasma Phycics and Laser Miscofusion CY - Warszaw N2 - Deposition of CNx Films in Inductively Coupled RF Discharge ER -
ZAJÍČKOVÁ, Lenka, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Deposition of CNx Films in Inductively Coupled RF Discharge. In \textit{Proceedings of ICPIG XXIV}. 1999th ed. Warszaw: Institute of Plasma Phycics and Laser Miscofusion, 1999, p.~41-42.
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