ELIÁŠ, Marek, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma. In Proceedings of 14th International Symposium on Plasma Chemistry. Prague (Czech Rep.): Institute of Plasma Physics AV CR, 1999, p. 1561-1566. ISBN 80-902724-3-6. |
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@inproceedings{234811, author = {Eliáš, Marek and Zajíčková, Lenka and Buršíková, Vilma and Janča, Jan and Lorenc, Michal}, address = {Prague (Czech Rep.)}, booktitle = {Proceedings of 14th International Symposium on Plasma Chemistry}, language = {eng}, location = {Prague (Czech Rep.)}, isbn = {80-902724-3-6}, pages = {1561-1566}, publisher = {Institute of Plasma Physics AV CR}, title = {Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma}, year = {1999} }
TY - JOUR ID - 234811 AU - Eliáš, Marek - Zajíčková, Lenka - Buršíková, Vilma - Janča, Jan - Lorenc, Michal PY - 1999 TI - Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma PB - Institute of Plasma Physics AV CR CY - Prague (Czech Rep.) SN - 8090272436 N2 - Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma ER -
ELIÁŠ, Marek, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Characterization of Composite Carbon Nitride Films Prepared by the Inductively Coupled RF Plasma. In \textit{Proceedings of 14th International Symposium on Plasma Chemistry}. Prague (Czech Rep.): Institute of Plasma Physics AV CR, 1999, p.~1561-1566. ISBN~80-902724-3-6.
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