Multi-Wavelength Angle-Resolved Scattering of Randomly Rough
Surfaces Based on the Scalar Diffraction Theory

J 2023

Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

ŠULC, Václav, Jiří VOHÁNKA, Ivan OHLÍDAL, Petr KLAPETEK, Miloslav OHLÍDAL et. al.

Basic information

Original name

Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory

Authors

ŠULC, Václav, Jiří VOHÁNKA (203 Czech Republic, belonging to the institution), Ivan OHLÍDAL (203 Czech Republic, belonging to the institution), Petr KLAPETEK, Miloslav OHLÍDAL, Nupinder Jeet KAUR and František VIŽĎA

Edition

Coatings, MDPI, 2023, 2079-6412

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10306 Optics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 3.400 in 2022

RIV identification code

RIV/00216224:14310/23:00132741

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.3390/coatings13111853

UT WoS

001120587500001

Keywords in English

roughness; scalar diffraction theory; angle-resolved scattering

Abstract

V originále

Angle-resolved scattering was measured for four samples of silicon exhibiting different surface roughnesses. The measurements were performed for three wavelengths: 457.9 nm, 514.5 nm, and 647.1 nm. Three approaches were used to evaluate the experimental data. The first approach corresponds to the exact formula derived using the scalar diffraction theory. This formula is quite complicated, and numerical methods must be used for its evaluation. For this reason, another two approaches representing approximations by much simpler formulae were considered. The use of several wavelengths allowed us not only to recover the power spectral density function in a limited interval of spatial frequencies but also to determine the total rms values of the heights, which represent the quantity of roughness for all spatial frequencies. The possibility of recovering the total rms values of the heights using the multi-wavelength approach is the most important result of this work. The results obtained from the scattering experiment and atomic force microscopy are compared.

Links

90239, large research infrastructures

Name: CEPLANT II

Citovat

ŠULC, Václav, Jiří VOHÁNKA, Ivan OHLÍDAL, Petr KLAPETEK, Miloslav OHLÍDAL, Nupinder Jeet KAUR and František VIŽĎA. Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory. Coatings. MDPI, 2023, vol. 13, No 11, p. 1-15. ISSN 2079-6412. Available from: https://dx.doi.org/10.3390/coatings13111853.

@article{2355407,
   author = {Šulc, Václav and Vohánka, Jiří and Ohlídal, Ivan and Klapetek, Petr and Ohlídal, Miloslav and Kaur, Nupinder Jeet and Vižďa, František},
   article_number = {11},
   doi = {http://dx.doi.org/10.3390/coatings13111853},
   keywords = {roughness; scalar diffraction theory; angle-resolved scattering},
   language = {eng},
   issn = {2079-6412},
   journal = {Coatings},
   title = {Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory},
   url = {https://doi.org/10.3390/coatings13111853},
   volume = {13},
   year = {2023}
}

TY  - JOUR
ID  - 2355407
AU  - Šulc, Václav - Vohánka, Jiří - Ohlídal, Ivan - Klapetek, Petr - Ohlídal, Miloslav - Kaur, Nupinder Jeet - Vižďa, František
PY  - 2023
TI  - Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory
JF  - Coatings
VL  - 13
IS  - 11
SP  - 1-15
EP  - 1-15
PB  - MDPI
SN  - 20796412
KW  - roughness
KW  - scalar diffraction theory
KW  - angle-resolved scattering
UR  - https://doi.org/10.3390/coatings13111853
N2  - Angle-resolved scattering was measured for four samples of silicon exhibiting different surface roughnesses. The measurements were performed for three wavelengths: 457.9 nm, 514.5 nm, and 647.1 nm. Three approaches were used to evaluate the experimental data. The first approach corresponds to the exact formula derived using the scalar diffraction theory. This formula is quite complicated, and numerical methods must be used for its evaluation. For this reason, another two approaches representing approximations by much simpler formulae were considered. The use of several wavelengths allowed us not only to recover the power spectral density function in a limited interval of spatial frequencies but also to determine the total rms values of the heights, which represent the quantity of roughness for all spatial frequencies. The possibility of recovering the total rms values of the heights using the multi-wavelength approach is the most important result of this work. The results obtained from the scattering experiment and atomic force microscopy are compared.
ER  -

ŠULC, Václav, Jiří VOHÁNKA, Ivan OHLÍDAL, Petr KLAPETEK, Miloslav OHLÍDAL, Nupinder Jeet KAUR and František VIŽĎA. Multi-Wavelength Angle-Resolved Scattering of Randomly Rough Surfaces Based on the Scalar Diffraction Theory. \textit{Coatings}. MDPI, 2023, vol.~13, No~11, p.~1-15. ISSN~2079-6412. Available from: https://dx.doi.org/10.3390/coatings13111853.

Detailed Information on Publication Record