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@proceedings{2358177, author = {Hnilica, Jaroslav and Klein, Peter and Britun, Nikolay and Vašina, Petr}, booktitle = {THE 22ND INTERNATIONAL VACUUM CONGRESS}, keywords = {magnetron; sputering; multipulse; OES; LIF}, language = {eng}, title = {Plasma diagnostics of multi-pulse HiPIMS discharge}, url = {https://ivc22.org}, year = {2022} }
TY - CONF ID - 2358177 AU - Hnilica, Jaroslav - Klein, Peter - Britun, Nikolay - Vašina, Petr PY - 2022 TI - Plasma diagnostics of multi-pulse HiPIMS discharge KW - magnetron KW - sputering KW - multipulse KW - OES KW - LIF UR - https://ivc22.org N2 - A complex understanding of the physical processes driving the HiPIMS discharge is essential for optimizing thin-film growth and developing more efficient sputtering processes. Ten years ago, it was proposed to split a standard single HiPIMS pulse into several micro-pulses, forming so-called chopped or multi-pulse HiPIMS (m-HiPIMS) [1]. This was done to enhance total ion flux to the substrate while keeping the deposition rate high. In the pulse sequence, many thermalized sputtered atoms are present in the volume after the first pulse, and these atoms can be ionized easier during the subsequent pulses. ER -
HNILICA, Jaroslav, Peter KLEIN, Nikolay BRITUN a Petr VAŠINA. Plasma diagnostics of multi-pulse HiPIMS discharge. In \textit{THE 22ND INTERNATIONAL VACUUM CONGRESS}. 2022.
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