HNILICA, Jaroslav, Peter KLEIN, Nikolay BRITUN and Petr VAŠINA. Plasma diagnostics of multi-pulse HiPIMS discharge. In THE 22ND INTERNATIONAL VACUUM CONGRESS. 2022.
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Basic information
Original name Plasma diagnostics of multi-pulse HiPIMS discharge
Authors HNILICA, Jaroslav, Peter KLEIN, Nikolay BRITUN and Petr VAŠINA.
Edition THE 22ND INTERNATIONAL VACUUM CONGRESS, 2022.
Other information
Original language English
Type of outcome Conference abstract
Country of publisher Japan
Confidentiality degree is not subject to a state or trade secret
WWW URL
Organization unit Faculty of Science
Keywords in English magnetron; sputering; multipulse; OES; LIF
Tags International impact
Changed by Changed by: doc. Mgr. Jaroslav Hnilica, Ph.D., učo 106259. Changed: 8/1/2024 13:56.
Abstract
A complex understanding of the physical processes driving the HiPIMS discharge is essential for optimizing thin-film growth and developing more efficient sputtering processes. Ten years ago, it was proposed to split a standard single HiPIMS pulse into several micro-pulses, forming so-called chopped or multi-pulse HiPIMS (m-HiPIMS) [1]. This was done to enhance total ion flux to the substrate while keeping the deposition rate high. In the pulse sequence, many thermalized sputtered atoms are present in the volume after the first pulse, and these atoms can be ionized easier during the subsequent pulses.
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