Detailed Information on Publication Record
2024
High-power-density sputtering of industrial-scale targets: Case study of (Al,Cr)N
KLIMASHIN, F. F., J. KLUSOŇ, Martin UČÍK, R. ŽEMLIČKA, M. JÍLEK et. al.Basic information
Original name
High-power-density sputtering of industrial-scale targets: Case study of (Al,Cr)N
Authors
KLIMASHIN, F. F. (guarantor), J. KLUSOŇ, Martin UČÍK (203 Czech Republic, belonging to the institution), R. ŽEMLIČKA, M. JÍLEK, A. LÜMKEMANN, J. MICHLER and T. E. J. EDWARDS
Edition
Materials and Design, Elsevier, 2024, 0264-1275
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10300 1.3 Physical sciences
Country of publisher
United Kingdom of Great Britain and Northern Ireland
Confidentiality degree
není předmětem státního či obchodního tajemství
References:
Impact factor
Impact factor: 8.400 in 2022
Organization unit
Faculty of Science
UT WoS
001137797200001
Keywords in English
Movable magnetron; High-power-density sputtering; AlCrN; Microstructure; Fracture toughness; Cutting performance
Tags
Tags
International impact, Reviewed
Změněno: 29/1/2024 08:21, Mgr. Marie Šípková, DiS.
Abstract
V originále
Large-scale sputter-deposition of hard protective coatings has not been prevalent as the large dimensions of the industrial targets posed an enormous technological challenge: only relatively low power (and plasma) densities could be achieved, resulting ultimately in poor performance of such coatings. Here, we introduce a novel sputtering technology allowing to reach high power densities for industrial tubular targets. This is realised on the principle of a longitudinal movement of a reduced-size magnetron inside the target. In doing so, peak power densities of 840 W/cm2 have been achieved for the overall power of 25 kW and the target dimensions of Ø110 × 510 mm. To demonstrate the effectiveness of the solution, we produced a series of cubic (Al,Cr)N coatings by sputtering an Al60Cr40 target. Most of the coatings have a stoichiometric composition, smooth surface and a moderate amount of growth defects. Significant improvements through recipe optimisation could be achieved resulting in mechanical properties (hardness, fracture toughness, wear resistance) being equal to and even exceeding those of the benchmark coatings produced by means of conventional sputtering and cathodic arc evaporation. Our results open up great potential of this novel sputtering technique for the coating industry.